"Novel Metal Electrodeposition and the Recent Application" ed. by Masato Sone, Kazuya Masu

This book presents recent progress in noble metal electrodeposition and applications of gold-based materials in the realization of highly sensitive CMOS-MEMS accelerometers.

Gold and noble metals have been attractive to humans from ancient times because of their beautiful features. In modern society, noble metals, especially gold, play important roles as components in electronic devices because of their high electrical conductivity, chemical stability, and density. In the field of MEMS devices, the demand for continuous miniaturization and sensitivity enhancement is always high. Especially for MEMS accelerometers, sensitivity is affected by Brownian noise, and components with sufficient mass are needed to suppress this noise. Therefore, it is difficult to reduce the dimensions of components to allow further miniaturization of the device.

Contents
1.Evaluation Methods of Mechanical Properties of Micro-Sized Specimens
2.Morphology Controlled Synthesis of the Nanostructured Gold by Electrodeposition Techniques
3.Cu Wiring Fabrication by Supercritical Fluid Deposition for MEMS Devices
4.Pulse-Current Electrodeposition of Gold
5.Electrodeposition of Gold Alloys and the Mechanical Properties
6.Hard Pure-Gold and Gold-CNT Composite Plating Using Electrodeposition Technique with Environmentally Friendly Sulfite Bath
7.Electrodeposition of High-Functional Metal Oxide on Noble Metal for MEMS Devices
8.Multi-Physics Simulation Platform and Multi-Layer Metal Technology for CMOS-MEMS Accelerometer with Gold Proof Mass