"Microelectromechanical Systems and Devices" ed. by Nazmul Islam

This book is about the advances of microelectromechanical systems (MEMS) and devices, the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling.

This book contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.

Contents
Preface
Part 1 BioMEMS Devices
1 Implantable Parylene MEMS RF Coil fbr Epiretinal Prostheses
2 MEMS-Based Microdevice fbr Cell Lysis and DNA Extraction
3 MEMS Microfluidics fbr Lab-on-a-Chip Applications
4 Acoustic Wave Based MEMS Devices, Development and Applications
Part 2 MEMS Characterization and Micro mach in ing
5 MEMS Characterization Based on OpticaI Measuring Methods
6 Sur face Characterization and Interfacial Adhesion in MEMS Devices
7 Advanced Surfactant-Modified Wet Anisotropie Etching
8 Macromodels of Micro-Electro- Mechanical Systems (MEMS)
Part 3 RF and Optica I MEMS
9 Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration
10 Characterization and Modeling of Charging Effects in Dielectrics fbr the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches
11 Plasma Based Dry Release of MEMS Devices
12 Optica I MEMS
13 Optica I-Ther mal Phenomena in Polycrystalline Silicon MEMS Dur ing Laser Irradiation
Part 4 MEMS based Actuators
14 Piezoelectric Th ick Films: Preparation and Characterization
15 Possibilities fbr Flexible MEMS: Take Display Systems as Examples
16 Thermal Microactuators
17 Standalone Tensile Testing of Th in Film Materials fbr MEMS/NEMS Applications
18 Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films fbr MEMS Applications