Fundamental Aspects of Plasma Chemical Physics

by Mario Capitelli (Author), Roberto Celiberto (Author), Gianpiero Colonna (Author), Fabrizio Esposito (Author), Claudine Gorse (Author), Khaled Hassouni (Author), Annarita Laricchiuta (Author), Savino Longo (Author)
Presents examples drawn from microelectronics, fusion, and aerospace
Provides detailed descriptions of the state-to-state kinetic approach for benchmark plasma systems, using worked examples
Assesses both fundamental concepts and open problems
The third of three volumes in a series about plasma chemistry


From the Back Cover
Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries.

The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.

About the Author
Mario Capitelli, University of Bari, mario.capitelli@ba.imip.cnr.it

Gianpiero Colonna, IMIP CNR

Fabrizio Esposito, IMIP CNR

Khaled Hassouni, Institut Galilee-Univeriste Paris

Annarita Laricchiuta, IMIP CNR

Savino Longo, University of Bari

Number of Illustrations and Tables
46 illus., 138 in colour
Topics
Plasma Physics
Physical Chemistry
Theoretical, Mathematical and Computational Physics
Mechanics

More info and Hardcover at Springer

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