Semiconductor Device (Repost)
Val Bradford, "Semiconductor Device"
English | 2011 | ISBN: 9789381157312, 9381157316 | 96 pages | PDF | 1,9 MB
English | 2011 | ISBN: 9789381157312, 9381157316 | 96 pages | PDF | 1,9 MB
Table of Contents
Chapter 1- Semiconductor Device Fabrication
Chapter 2 - Photolithography
Chapter 3 - Ion Implantation
Chapter 4 - Dry Etching, Etching & Plasma Ashing
Chapter 5 - Thermal Treatments
Chapter 6 - Chemical Vapor Deposition
Chapter 7 - Physical Vapor Deposition
Chapter 8 - Molecular Beam Epitaxy & Chemical-Mechanical Planarization
Chapter 9 - Wafer Testing, Wafer Backgrinding & Die Preparation
Chapter 10 - Other Processes in Semiconductor Device Fabrication