Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2 (Repost)
Handbook of Semiconductor Technology: Processing of Semiconductors, Volume 2 By
2000 | 702 Pages | ISBN: 3527298355 | PDF | 20 MB
2000 | 702 Pages | ISBN: 3527298355 | PDF | 20 MB
In this self-contained handbook deals on the enabling materials technology for the electronics industry world-renowned authors treat the processing of semiconductors and related technologies.Content: Chapter 1 Silicon Processing (pages 1–65): John G. WilkesChapter 2 Compound Semiconductor Processing (pages 67–109): J. Brian MullinChapter 3 Epitaxial Growth (pages 111–176): Thomas E Kuech and Michael A. TischlerChapter 4 Photolithography (pages 177–263): Rainer Leuschner and Georg PawlowskiChapter 5 Selective Doping (pages 265–289): Subhash MahajanChapter 6 Etching Processes in Semiconductor Manufacturing (pages 291–339): Kevin G. Oonohoe, Terry Turner and Kenneth A. JacksonChapter 7 Silicon Device Structures (pages 341–390): Chun?Yen Chang and Simon M. SzeChapter 8 Compound Semiconductor Device Structures (pages 391–406): William E. Stanchina and Juan E LamChapter 9 Silicon Device Processing (pages 407–487): Dim?Lee KwongChapter 10 Compound Semiconductor Device Processing (pages 489–605): John M. ParseyChapter 11 Integrated Circuit Packaging (pages 607–647): Daniel I. AmeyChapter 12 Interconnection Systems (pages 649–681): Wulf Knausenberger