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    3. Shape and Functional Elements of the Bulk Silicon Microtechnique

    Shape and Functional Elements of the Bulk Silicon Microtechnique

    Posted By: Free butterfly
    Date: 26 Feb 2016 08:23:17
    Shape and Functional Elements of the Bulk Silicon Microtechnique

    Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures by Joachim Frühauf
    English | 12 Oct. 2004 | ISBN: 3540221093 | 228 Pages | PDF | 9 MB

    The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany.

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