Run-to-Run Control in Semiconductor Manufacturing by James Moyne
Run-to-Run Control in Semiconductor Manufacturing by James Moyne
English | November 30, 2000 | ISBN: 0849311780 | 342 pages | PDF | 8 MB
English | November 30, 2000 | ISBN: 0849311780 | 342 pages | PDF | 8 MB
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization.