Semiconductor manufacturing for technicians
Semiconductor manufacturing for technicians By Michael Quirk; Julian Serda
2000 | 510 Pages | ISBN: 0130815209 | DJVU | 16 MB
2000 | 510 Pages | ISBN: 0130815209 | DJVU | 16 MB
1. Introduction to the Semiconductor Industry. 2. Characteristics of Semiconductor Materials. 3. Device Technologies. 4. Silicon and Wafer Preparation. 5. Chemicals in Semiconductor Fabrication. 6. Contamination Controls in Wafer Fabs. 7. Metrology and Defect Inspection. 8. Gas Control in Process Chambers. 9. IC Fabrication Process Overview. 10. Oxidation. 11. Deposition. 12. Metallization. 13. Photolithography: Vapor Prime to Soft Bake. 14. Photolithography: Alignment and Exposure. 15. Photolithography: Photoresist Development and Advanced Lithography. 16. Etch. 17. Ion Implant. 18. Chemical Mechanical Planarization. 19. Wafer Test. 20. Assembly and Packaging. Appendices. Glossary. Index