Silicon Processing for the VLSI Era, Vol. 1: Process Technology
Silicon Processing for the VLSI Era, Vol. 1: Process Technology By Stanley Wolf, Richard N Tauber
Publisher: Lat,ti,ce Press 1986 | 660 Pages | ISBN: 0961672137 | PDF | 38 MB
Publisher: Lat,ti,ce Press 1986 | 660 Pages | ISBN: 0961672137 | PDF | 38 MB
A thorough, if somewhat dry (makes the wall street journal look like a Sweet Valley High novel) treatment of modern semiconductor fabrication processes. This text is intended as a detailed overview of the processes involved in semiconductor design, particularly MOS technologies. In this regard it works well, through it shouldn't be considered a reference manual for the wafer fabrication engineer. A good summary for people who, like myself, work in the semiconductor industry, but do not deal with the details of fabrication processes on a daily basis.
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