Osamu Tabata, Toshiyuki Tsuchiya, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, "Reliability of MEMS: Testing of Materials and Devices"
2008 | pages: 326 | ISBN: 3527314946 | PDF | 5,3 mb
2008 | pages: 326 | ISBN: 3527314946 | PDF | 5,3 mb
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices.